Paper
Adaptive Optics Applications in Imaging System for Roughness Measurement of Metal Surface
- Authors:
- Yiin Kuen Fuh; Kuo Chan Hsu; Jia Ren Fan; Ming Xien Lin
- Abstract
- This paper explores the capability of adaptive optics (AO) and its potential applications in precision instrument. The main purpose of this paper is to demonstrate the necessity of AO compensation where disturbances of both heat and fluid flow exist. In the absence of AO correction scheme, induced turbulences can severely degrade the residual rms errors from 0.14 to 1.4 μm. After real time closed-loop AO correction, we can improve wavefront with rms of 0.12 μm, which not only compensate aberration error from induced disturbances, but also overall optical system. Measurement results of five steel samples from roughness Ra 0.2 to 3.125μm (0.3 λ and 5 λ, where λ is diode laser wavelength) demonstrate an excellent correlation between the SdBD and Ra with correlation coefficient of 0.9982.
- Keywords
- Adaptive Optics; Imaging System; Binarized Analysis; Speckle Pattern; Roughness; Disturbances
- StartPage
- 17
- EndPage
- 21
- Doi