Paper

Study of TiO2 Nanotubes for Sensors and Integrated Devices


Authors:
I. Pereyra; M.N.P. Carre?o; M.Z. Mielli; T.M. Fraga; K.F. Albertin
Abstract
TiO2 nanotube arrays obtained by Ti foil anodization are tested as pH electrodes, showing performance close to standard glass electrodes. The TiO2 nanotube arrays were obtained by Ti foil anodization in a NH4F organic solution with different anodization voltages and times. Annealing treatment to promote nanotubes crystallization in anatase phase is also done. The obtained nanotubes samples were characterized by Raman spectroscopy and Scanning Electron Microscopy (SEM). In order to assess the viability of integrating the nanotubes to microfluidic devices, patternig of the nanotubes arrays is demonstrated and experiments showing the growth within microchannels and microcavities are also performed. Although preliminar, these results are promising for development of TiO2 nanotube based biosensors integrated in microfluidic “Lab-on-Chip” systems.
Keywords
TiO2 Nanotubes; Ph Sensors; Photolithography Pattern
StartPage
114
EndPage
121
Doi
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