Paper
Electrical Characterization and Modeling of Hexamethyldisiloxane Thin Film Humidity Sensors
- Authors:
- Noubeil Guermat; Azzedine Bellel; Salah Sahli; Patrice Raynaud
- Abstract
- This paper reports the study of humidity-sensitive and electrical properties plasma polymerization of hexamethyldisiloxane (pp-HMDSO) thin film based sensors. The humidity sensitive film was deposited by glow discharge at low frequency power (19 kHz) in a capacitively coupled parallel plate plasma reactor. The sensor design comprises the interdigitated electrodes and the absorbing layer. The sensor was calibrated in terms of impedance as a function of relative humidity (10% to 95%), using a Frequency Response Analyzer. The signal frequency range was between 102 to 107 Hz with amplitude of 3 V. Hexamethyldisiloxane thin film is investigated as humidity sensor. The deposited film sensor exhibited a small hysteresis (2% RH) and fast response (8 and 34 s for adsorption and desorption between 35% RH and 95% RH, respectively). The results of an electrochemical impedance spectroscopy (EIS) study performed by measuring the sensor's complex impedance, were analyzed and employed to extract equivalent circuit models. Such models have humidity-dependent element values and their structure has a direct relationship with the sensor physics. The performance of the films and the results of the model simulations are herewith presented and discussed. The HMDSO film showed promising characteristics for humidity sensor development.
- Keywords
- HMDSO; Humidity Sensors; Thin Film; Electrical Characterization; Modeling
- StartPage
- 13
- EndPage
- 17
- Doi