Paper
The Research of Compound Accelerometer Sensor Technology
- Authors:
- Xiangju Xu; Hongzhi Meng; Wenyan Li; Tao Guo
- Abstract
- This paper gives a process design about the existing structure of multi-ranged piezoresistive micro-accelerometer . We Select the SOI material. Suitable process is designed for layout design, processing chip, encapsulation and testing. The result shows that the technology can achieve very good structural design requirements. Process design is feasible.
- Keywords
- Composite Scal；Technology；Soi Accelerometer
- StartPage
- 39
- EndPage
- 41
- Doi